The below figures include only those killed, not those taken prisoners or wounded.

Branch (incl. pow) Dead %
Heer 4.202.030 79,0
Kriegsmarine 138.429 2,6
Luftwaffe 432.706 8,1
Waffen-SS 313.749 5,9
Volkssturm 77.726 1,5
Police 63.462 1,2
Auxiliary 53.231 1,0
Support org (non-aux.) 37.198 0,7
Total 5.318.531

Branch (pow) Dead %
Wehrmacht 393.013 8,14
Waffen-SS 28.264 9,01
Volkssturm 21.099 27,15
Various 17.099 16,99
Total 459.475 8,6
(% of those inprisoned)

Sources used

Rüdiger Overmans - Deutsche militärische Verluste im Zweiten Weltkrieg